PlasmaPro 100 Fluorine Etcher
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General Information
- Contract Opportunity Type: Solicitation (Original)
- Original Published Date: Nov 26, 2024 12:43 pm EST
- Original Date Offers Due: Dec 04, 2024 02:00 pm EST
- Inactive Policy: 15 days after date offers due
- Original Inactive Date: Dec 19, 2024
- Initiative:
- None
Classification
- Original Set Aside:
- Product Service Code: 5999 - MISCELLANEOUS ELECTRICAL AND ELECTRONIC COMPONENTS
- NAICS Code:
- 334513 - Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables
- Place of Performance: Oak Ridge , TN 37830USA
Description
PlasmaPro 100 Cobra 300 - Fluorine Etcher (Bosch Configuration)
Prepare a clear and concise description of the supplies or services that is not unnecessarily restrictive of competition and will allow a prospective offeror to make an informed business judgment as to whether a copy of the solicitation should be requested. The Federal Acquisition Regulation (FAR) has specific recommendations in Part 5. It is recommended that specific clauses should NOT be included in full, just referenced or attached. The description section does have a character cap (65,535), as it should be brief and include necessary details. Attachments and links can be added as needed for further documentation.
See additional details in: "Plasma Silicon Etcher Specification" document attached.
Attachments/Links
Contact Information
Contracting Office Address
- Oak Ridge National Laboratory PO Box 2008
- Oak Ridge , TN 37831
- USA
Primary Point of Contact
- Tina Moody
- moodyt@ornl.gov
- Phone Number 8652415386
Secondary Point of Contact
History
- Dec 20, 2024 12:19 am ESTSolicitation (Original)