Closed loop 3D vacuum nano positioning stage

The Acquisition Management Division (AMD) at the National Institute of Standards and Technology (NIST) intends to procure a Closed loop 3D vacuum nano positioning stage under a Firm Fixed Price Purchase Order using Simplified Acquisition Procedures for Commercial Items (FAR Parts 12 and 13).

Within the Photonics and Optomechanics Group in the Microsystems and Nanotechnology Division at the National Institute of Standards and Technology, the group does research involving photonic crystals for optomechanics.  This work is part of the “Hybrid phononic/photonic crystal membrane for cavity quantum optomechanics” research project within the Photonics and Optomechanics Group in the Microsystems and Nanotechnology Division.  These optomechanical photonic crystals have applications including small force sensing, accelerometry, vacuum measurement, and quantum technologies, all of which are pursued at NIST. 

The group  typically fabricates about ten devices on a chip, and they must be probed with a laser in a vacuum environment at a pressure of 10-7 Torr.  NIST requires a nano positioning stage to move the chips for probing by up to 20 mm in 3D with closed loop control.  The stage must occupy a relatively small amount of space to fit in our vacuum chamber. 

The system shall meet or exceed the minimum requirements identified below. All items must be new.  Used or remanufactured equipment will not be considered for award. Experimental, prototype items will not be considered.  The use of “gray market” components not authorized for sale in the U.S. by the proposer is not acceptable.   All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.  

Specifically, NIST requires a nano positioning system to move samples in 3D with a range of 20 mm in each direction.  The nano positioning system shall be used in a high-vacuum chamber with limited space available. 

Technical Requirements:

Linear motion in 3D (x,y,z) over a range of at least 20 mm in each direction

Closed-loop control with positioning accuracy below 100 nm

Overall size: Must fit in a volume of 3”x 3”x 4” (length, width, height)

Suitable for vacuum down to 10-7 Torr

Market research was conducted and the only system able to meet all the specifications provided above is the system manufactured by Attocube.  

The North American Industry Classification code for this acquisition is 334513, Instruments and related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables with 750 employee's small business size standard.   

A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government.  Information received will be considered solely for the purpose of determining whether to conduct a competitive procurement.

No solicitation package will be issued.  This notice of intent is not a request for competitive quotations.  This notice of intent is not a request for quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. Interested parties that believe they can satisfy the requirements listed above must identify their capability in writing before the response date of this notice. Only responses received by 12:00 p.m. Eastern Standard Time on August 24, 2023, will be considered by the government.  Responses shall be submitted via email to joni.laster@nist.gov.